Automatic Wafer Transfer System PDF Print E-mail
The GLA Automatic Wafer Transfer System is a clean, reliable and simple to use batch wafer transfer system. Fast, safe transfers are achieved with the use of a custom edge contact gripper design on an inverted pendulum transfer arm. The Class 1 rated system employs the latest in DSP controls, stepping motors and sensory feedback to meet the stringent demands for reliability, speed, ease of use, and error free operation in today's highly automated wafer fabs. The compact, tabletop design is available in 150 and 200mm versions. Footprint: 482mm wide x 508mm deep.