Intelligent Multi-mode Wafer Transfer System PDF Print E-mail
GLA announces the availability of the Intelligent Multimode Wafer Transfer System for 150 & 200mm wafers. The system employs the latest in DSP controls, stepping motors and sensory feedback to meet the stringent demands for reliability, speed, ease of use and error free operation in today's highly automated wafer fabs. The Intelligent Multimode Wafer Transfer System includes the GLA Automatic Notch/Flat Wafer Aligner and OCR Wafer ID Reader at a fraction of the cost of these capabilities purchased as standalone systems. Smooth microcomputer controlled wafer transfer from shipping carrier to process cassettes takes less than 25 seconds. Models are also available to meet almost all transfer requirements including wafer transfer to quartz boats. Requiring only 120/240VAC input, the system can be installed and fully operational with little effort and minimal interruption of operations.

Features:
  • Inverted pendulum transfer arm
  • Reliable, fast wafer transfer
  • Maps cassette and reads wafer IDs
  • Aligns wafers
  • Gallium arsenide and silicon wafers
  • Small footprint (530mm X 530mm)
  • DSP controls with sensory feedback
  • Fail-safe operation
  • Class 1 rated
Options:
  • Barcode reader
  • RF tag reader
  • GEM/SECS-II interface
  • 25-25 to 50 Teflon boat
  • Wafer transfer only