Load Port - FOUP PDF Print E-mail
The GLA FOUP Port was developed to address the need for an affordable, low maintenance, superior design. The simple but innovative design, inherent reliability, low cost and a full 2-year warranty makes it a smart choice for OEM applications.
  • SEMI compliant
  • Opens or closes FOUP in 7 seconds or less including mapping standard
  • 4 second operation possible with optional high speed kit
  • Soft action door minimizes FOUP air turbulence
  • Microstepping technology, reliable thru-beam wafer mapping & protrusion sensors
  • Innovative easy load FOUP guide
  • Thin profile door interface plate reduces process tool footprint
  • Low operating cost---no need for lubrication, dry air or vacuum purge
  • RFID tag, barcode reader & SEMI E84 AGV interface options
  • Utilities required: 90-240V AC, 50/60HZ or 24V DC and 500mm Hg vacuum