Dynamic Slide Transfer
The Dynamic Slide Transfer supports the sending and receiving cassettes on a bearing-supported moving platform which virtually eliminates particle generation. Models are available to transfer wafers between any cassette type including metal and half-height cassettes. A safety lock prevents movement before cassettes are securely located on the moving platform. Another advantage of this model is the extremely small footprint. Wafers are transferred by edge-only contact with clean, low particle material. A wide-pusher option is available for flatted wafers to maintain alignment if flats are generally in direction of pusher. Models are available for all wafer sizes except 300mm.